Design and Analysis of Micro/Nano X-Y Positioning Stages for Evaluation of Stiffness of Suspension Beams

Now a days, in-precision manipulation systems stiffness are plays an important role to predict precise performance of a suspension beam, due to the high precision control of motion the Nano-position are widely used in industrial and research applications which requires super resolution, such as microscopy, nanofabrication, Nano-patterning and interferometer. Finite Element method which helps to determine stiffness of folded suspension beams with present research trends. This work proposes to calculation of stiffness which is an important parameter to analyze performance of suspension beam for large displacements in positioning stages. Also using various governing equations for straight beams in stages are chose and the analysis is carried out the defined value of stress with deformation and comparing with numerical and analytical data.