Published February 3, 2026 | Version v1
Dataset Open

Dataset for "Ultrathin amorphous p-type tellurium oxide films enabled by cryogenic deposition"

  • 1. ROR icon University of California, Berkeley
  • 2. ROR icon Taiwan Semiconductor Manufacturing Company (United States)

Description

This dataset is for the paper "Ultrathin amorphous p-type tellurium oxide films enabled by cryogenic deposition" that will be published.

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Additional details

Funding

United States Department of Energy
DE-AC02-05-CH11231
National Research Foundation of Korea
RS-2024-00342775
Japan Science and Technology Agency
JPMJPR23H7