Exploring the Boundaries of MEMS Gyroscope Scale Factor Temperature Stability via Distributed On-Chip Strain Measurements

Published November 26, 2025 | Version v1

Journal article Open

Files

Name	Size	Download all
Exploring_the_Boundaries_of_MEMS_Gyroscope_Scale_Factor_Temperature_Stability_via_Distributed_On-Chip_Strain_Measurements.pdf md5:4f64a78d9e831f48263fa0e1a702bf60	8.8 MB	Preview Download

Views

Downloads

Show more details

DOI

Resource type

Journal article

Publisher

Zenodo

Published in

IEEE Journal of Microelectromechanical Systems, 2025.

License: Creative Commons Attribution 4.0 International

The Creative Commons Attribution license allows re-distribution and re-use of a licensed work on the condition that the creator is appropriately credited. Read more