Published November 11, 2025 | Version v1
Dataset Open

Dataset and source code for article "Information advantage in sensing revealed by Fano-resonant Fourier scatterometry"

  • 1. ROR icon Institute for Atomic and Molecular Physics
  • 2. ROR icon Advanced Research Center for Nanolithography (Netherlands)
  • 3. ASML

Description

This replication package contains raw data and source code to replicate the figures for the article "Information advantage in sensing revealed by Fano-resonant Fourier scatterometry" published in Nature Communications:

Feldman, N., den Boef, A. J., Amitonova, L.V., Koenderink, A. F.,  "Information advantage in sensing revealed by Fano-resonant Fourier scatterometry". Nat. Commun. (2025). (DOI: 10.1038/s41467-025-66187-9)

Files

Feldman Nat. Commun. Information Advantage.zip

Files (600.9 MB)

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Is cited by
Journal article: 10.1038/s41467-025-66187-9 (DOI)