Published August 4, 2025 | Version v1
Conference paper Open

FAME: An Open-Source Data Platform for Exploring Metrology Files and More

  • 1. Fraunhofer ENAS
  • 1. Nationale Forschungsdateninfrastruktur (NFDI) e.V.
  • 2. University of Amsterdam

Description

Modern development environments, particularly in applied and experimental domains such as 
semiconductor metrology, face growing demands for managing large volumes of measurement 
data in structured, interoperable, and reusable ways. However, smaller academic institutions, 
research transfer organizations, as well as small companies, often still lack access to scalable 
and affordable research data management (RDM) tools. Instead, they rely on spreadsheets, 
shared folders, and a lot of human discipline to organize data, leading to inconsistent practices, 
weak traceability, and limited reuse.

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