Published August 4, 2025
| Version v1
Conference paper
Open
FAME: An Open-Source Data Platform for Exploring Metrology Files and More
Contributors
Editors:
- 1. Nationale Forschungsdateninfrastruktur (NFDI) e.V.
- 2. University of Amsterdam
Description
Modern development environments, particularly in applied and experimental domains such as
semiconductor metrology, face growing demands for managing large volumes of measurement
data in structured, interoperable, and reusable ways. However, smaller academic institutions,
research transfer organizations, as well as small companies, often still lack access to scalable
and affordable research data management (RDM) tools. Instead, they rely on spreadsheets,
shared folders, and a lot of human discipline to organize data, leading to inconsistent practices,
weak traceability, and limited reuse.
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CoRDI_2025_paper_302.pdf
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