Atomic Layer Deposition and Etching Process Schemas Extracted with Schema-Miner

This data repository contains the extracted JSON schemas for Atomic Layer Deposition (ALD) and Atomic Layer Etching (ALE) processes, extracted using the Schema-Miner tool. The schemas are categorized under two distinct use cases: experimental and simulation, to reflect the differing perspectives in ALD/E process modeling.

Each schema captures essential process properties, along with their respective constraints, data types, and other structural details necessary for standardized representation and interoperability. The schema extraction was conducted from a curated set of scientific publications related to ALD/E, leveraging large language models (LLMs) in combination with domain-expert insights to ensure both accuracy and relevance.

The complete methodology is described in our paper “LLMs4SchemaDiscovery: A Human-in-the-Loop Workflow for Scientific Schema Mining with Large Language Models,” presented at ESWC Conference 2025. Read the paper here.

The Schema-Miner tool is publicly available on GitHub: Access the repository.

The extracted schemas have also been uploaded as templates to the Open Research Knowledge Graph (ORKG), and can be accessed via the following links:

Atomic Layer Deposition: 

• Experimental Schema: https://orkg.org/templates/R1366244
• Simulation Schema: https://orkg.org/templates/R1368294

Atomic Layer Etching

• Experimental Schema: https://orkg.org/templates/R1379646
• Simulation Schema: https://orkg.org/templates/R1434008
  

What is New in Version 2?

In this updated release, we have integrated the QUDT (Quantities, Units, Dimensions, and Data Types) ontology into the ALD/E process schemas. This integration enables semantic annotation of all properties that represent physical quantities, improving interoperability and machine interpretability.

For each physical quantity identified in the schema, the following three components have been added:

• quantityKind: Specifies the kind of physical quantity (e.g., Temperature, Pressure)
• unit: Refers to the unit of measurement (e.g., Kelvin, Pascal)
• quantityValue: Captures the numerical value

This mapping aligns the schemas with semantic web standards and enhances their potential for reasoning, validation, and integration with other scientific datasets.

A complete list of QUDT-mapped properties and their corresponding quantityKind and unit values is available in qudt-mapped-properties-overview.pdf