Published December 3, 2024 | Version v1
Conference paper Open

Design and Optimization of a New Compact and Totally Decoupled Nanopositioning Stage

Authors/Creators

  • 1. ROR icon Guangdong University of Technology
  • 2. Guangdong university of technology

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2024_3M-NANO_伍威_提交版.pdf

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Additional details

Dates

Accepted
2024-07-29