Published May 2, 2025 | Version v1
Dataset Open

Thermal Atomic Layer Etching of Aluminum Oxide by Hydrogen Fluoride and Trimethylaluminum: First-Principles Study

Authors/Creators

  • 1. ROR icon Sejong University
  • 2. ROR icon Universitas Pertamina

Description

Coordinate data set from the DFT calculation of the atomic layer etching reactions.

Files

Coordinate dataset.zip

Files (108.2 kB)

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