Published January 31, 2025 | Version v1.0
Dataset Open

Membrane phononic crystals for high-Q_m mechanical defect modes in piezoelectric aluminum nitride

Authors/Creators

  • 1. ROR icon Chalmers University of Technology
  • 2. ROR icon Otto-von-Guericke University Magdeburg

Description

Data used for figures in "Membrane phononic crystals for high-Q_m mechanical defect modes in piezoelectric aluminum nitride" by Anastasiia Ciers et.al 

Notes

This work was supported by the Knut and Alice Wallenberg (KAW) Foundation through a Wallenberg Academy Fellowship (W.W.), the KAW project no. 2022.0090, and the Wallenberg Center for Quantum Technology (WACQT, A.C.). H.P. acknowledges funding by the European Union under the project MSCA-PF-2022-OCOMM. MOVPE of AlN on Si was performed at Otto-von-Guericke-University Magdeburg. The mechanical resonators were fabricated in the Myfab Nanofabrication Laboratory at Chalmers. 

Files

PnC_membrane_AlN_Zenodo.zip

Files (426.9 kB)

Name Size Download all
md5:ae8ca1e0bcfd11a54a0f019918450208
426.9 kB Preview Download