Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride
Authors/Creators
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Ciers, Anastasiia
(Data collector)1
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Jung, Alexander
(Data collector)1
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Ciers, Joachim
(Project member)1
- Nindito, Laurentius Radit (Data collector)1
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Pfeifer, Hannes
(Project member)1
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Dadgar, Armin
(Project member)2
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Bläsing, Jürgen
(Project member)2
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Strittmatter, Andre
(Project member)2
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Wieczorek, Witlef
(Project leader)1
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1.
Chalmers University of Technology
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2.
Otto-von-Guericke University Magdeburg
Description
Data used for figures in "Thickness dependence of the mechanical properties of piezoelectric high-Q_m nanomechanical resonators made from aluminium nitride" Anastasiia Ciers et.al Materials for Quantum Technology 4, 046301 (2024); arXiv:2410.03944 [cond-mat.mes-hall] (2024)
Notes (English)
This work was supported by the Knut and Alice Wallenberg (KAW) Foundation through a Wallenberg Academy Fellowship (W.W.), the KAW project no.~2022.0090, and the Wallenberg Center for Quantum Technology (WACQT, A.C.), and the Swedish Research Council (VR project No. 2019-04946). H.P.~acknowledges funding by the European Union under the project MSCA-PF-2022-OCOMM. MOVPE of AlN on Si was performed at Otto-von-Guericke-University Magdeburg. The mechanical resonators were fabricated in the Myfab Nanofabrication Laboratory at Chalmers and analyzed in Chalmers Materials Analysis Laboratory.
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- Publication: 10.1088/2633-4356/ad9b64 (DOI)