Free-standing millimeter-range 3D waveguides for on-chip optical interconnects

Next-generation energy-efficient photonic integrated systems, such as neuromorphic computational chips require efficient heterogeneous integration of ultracompact light sources and photodetectors through highly dense waveguide circuits. However, interconnecting these devices in emitter-receiver communication circuits remains a challenge and an obstacle towards upscaling heterogeneous photonic chips. Here we report on versatile air-cladded free-standing 3D polymer waveguides (OrmoCore, n≈1.5) spanning up to 900 µm in length without intermediate mechanical support structures, microprinted via two-photon polymerization. The presented waveguides are suitable for on-chip out-of-plane light coupling as well as non-connected 3D crossings, needed for high density optical circuits. The waveguides show optical transmission losses of 1.93 dB mm⁻¹ at λ = 635 nm, and of 3.71 dB mm⁻¹ at λ = 830 nm in the wavelength range of GaAs-based microLEDs spectral emission. On-chip imaging for high-precision alignment and TPP microfabrication are performed seamlessly by utilizing the same laser source for both steps, allowing accurate 3D printing on microstructured substrates. As proof of concept, we interconnect two GaAs-based microLEDs via an on-chip microprinted 3D waveguide. Such combined systems can serve as building blocks of future complex integrated heterogeneous photonic networks.