Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics
Authors/Creators
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1.
Chalmers University of Technology
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2.
Otto-von-Guericke University Magdeburg
Description
Data used for figures in "Nanomechanical AlN resonators for room temperature quantum optoelectromechanics" Anastasiia Ciers et.al
Notes (English)
Funding: This work was supported by the Knut and Alice Wallenberg (KAW) Foundation through a Wallenberg Academy Fellowship (W.W.), the KAW project no. 2022.0090, and the Wallenberg Center for Quantum Technology (WACQT, A.C.), the Swedish Research Council (VR projects No. 2019-04946), the QuantERA project C’MON-QSENS!, and Chalmers’ Area of Advance Nano. H.P. acknowledges funding by the European Union under the project MSCA-PF-2022-OCOMM. MOVPE of AlN on Si was performed at Otto-von- Guericke-Univerrsity Magdeburg. The mechanical resonators
were fabricated in the Myfab Nanofabrication Laboratory at Chalmers and analyzed in the Chalmers Materials Analysis Laboratory.
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