Investigation of adhesion layers for the deposition of magnetostrictive CoxFe(1-x) films on ScyAl(1-y)N films for magnetoelectric MEMS sensors
Authors/Creators
- 1. Chair Materials for Electrical Engineering and Electronics MEEE and Institute of Micro and Nanotechnologies IMN MacroNano, Technische Universität Ilmenau, Ilmenau, Germany
- 2. Advanced Electromagnetics Group and Institute of Micro and Nanotechnologies IMN MacroNano, Technische Universität Ilmenau, Ilmenau, Germany
Description
For magnetoelectric film stacks, Co/Fe multilayers are deposited on piezoelectric (Sc)AlN films on Si/SiO2 substrates and subsequently annealed by rapid thermal annealing (RTA) to create a Co-Fe alloy phase. In this study, the influence of an optional adhesion layer of 5 nm Cr or Zr on the phase transformation and interlayer properties was investigated. The dataset provided contains logfiles from the RTA process, raw data of X-ray diffraction (XRD), enery dispersive X-ray spectroscopy (EDS) measurements and scanning electron microscope (SEM) images of focused ion beam (FIB) prepared cross-sections.
Results published in:
H. Honig, H. Töpfer, P. Schaaf; Adhesion layers between piezoelectric and magnetostrictive layers in a MEMS magneto-sensor stack: Influence on the phase transformation of deposited Co/Fe multilayers to magnetostrictive CoxFe1−x phase. J. Vac. Sci. Technol. A 1 December 2024; 42 (6): 063405. https://doi.org/10.1116/6.0004071
Other
Acknowledgement
This work is supported by the Free State of Thuringia and the European Social Fund within grant 2017 FGR 0060. Support by the Center of Micro- and Nanotechnologies (ZMN) (DFG Resources reference: RI_00009), a DFG funded core facility (Grant No. MU3171/2-1 + 6-1, SCHA 632/19-1 + 27-1, HO 2284/4-1 + 12-1) of the TU Ilmenau, is gratefully acknowledged.
Files
EDS.zip
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Additional details
Related works
- Is source of
- Journal article: 10.1116/6.0004071 (DOI)