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Published January 23, 2018 | Version v1
Conference paper Restricted

SUMCASTEC_180123_NA_2017MSTpaper_Conference paper_.pdf_Frankfurt Oder_M. Inac_Partners_Last draft


  • 1. IHP


Abstract for the VDE–MikroSystemTechnik Kongress (MST), October 23-25, 2017. Title: "BiCMOS eingebettete Mikrofluidiktechnologie basierend auf Wafer- Bonding-Techniken für Biosensor-Anwendungen BiCMOS Embedded Microfluidic Technology Based on Wafer Bond- ing Techniques for Biosensor Applications". 



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