Published February 27, 2024 | Version v2
Dataset Open

Carinthia dataset

Description

The Carinthia dataset contains Scanning Electron Microscope (SEM) images of defects found on one production layer of unstructured semiconductor wafers. The dataset consists of 4,591 images unevenly distributed in six defect classes. The dataset's description is available in the 'carinthia_dataset.html' file, and the images themselves can be found in the 'data.zip' file.

Files

data.zip

Files (136.4 MB)

Name Size Download all
md5:7ac95f3ef725c5fb03823f6e53f020b6
2.6 MB Download
md5:457011cf9063e5a49751f33ea468309d
133.8 MB Preview Download

Additional details

Funding

European Commission
AIMS5.0 – Artificial Intelligence in Manufacturing leading to Sustainability and Industry5.0 101112089