Published February 27, 2024 | Version v2
Dataset Open

Carinthia dataset

  • 1. KAI - Kompetenzzentrum Automobil- und Industrieelektronik GmbH
  • 2. Infineon Technologies Dresden GmbH & Co. KG
  • 3. Infineon Technologies Austria AG


The Carinthia dataset contains Scanning Electron Microscope (SEM) images of defects found on one production layer of unstructured semiconductor wafers. The dataset consists of 4,591 images unevenly distributed in six defect classes. The dataset's description is available in the 'carinthia_dataset.html' file, and the images themselves can be found in the '' file.


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Additional details


AIMS5.0 – Artificial Intelligence in Manufacturing leading to Sustainability and Industry5.0 101112089
European Commission