Nanomechanical crystalline AlN resonators with high quality factors for quantum optoelectromechanics

Funding: This work was supported by the Knut and Alice Wallenberg (KAW) Foundation through a Wallenberg Academy Fellowship (W.W.), the KAW project no.~2022.0090, and the Wallenberg Center for Quantum Technology (WACQT, A.C.), the Swedish Research Council (VR projects No. 2018-05061 and 2019-04946), the QuantERA project C’MON-QSENS!, and Chalmers’ Area of Advance Nano. H.P. acknowledges funding by the European Union under the project MSCA-PF-2022-OCOMM. MOVPE of AlN on Si was performed at Otto-von-Guericke-Univerrsity Magdeburg. The mechanical resonators were fabricated in the Myfab Nanofabrication Laboratory at Chalmers and analyzed in the Chalmers Materials Analysis Laboratory. Simulations were performed on resources provided by the National Academic Infrastructure for Supercomputing in Sweden (NAISS) partially funded by the Swedish Research Council through grant agreement no. 2022-06725.