THE IMPACT OF CHANGES IN OPERATIONAL PARAMETERS ON NITROGEN ADDITION DURING THE FORMATION OF THIN FILMS OF TICN

This paper presents the influence of changing operational parameters during the process of adding nitrogen to create TiCN films. These films are deposited onto steel substrates using DCMS and RFMS Magnetron Sputtering sources. The TiC and TiCN compositions are made by combining Ti and C targets with N₂ and Ar fluxes. The composition, microstructure, and thickness of the different conditions were analyzed using X-Ray Diffraction, Scanning Electron Microscopy, Raman Spectroscopy, and Profilometry. The results demonstrated that homogeneous TiC thin films were produced, with thicknesses ranging from 120 to 570 nm. Additionally, TiCN films were produced, with thicknesses varying from 120 to 140 nm. Moreover, all films exhibited a uniform distribution of elements on the surface of the substrate.