Published August 1, 2023 | Version v1
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Road Map of Semiconductor Metal-Oxide-Based Sensors: A Review

  • 1. IIEST Shibpur, Dept Chem, Howrah 711103, W Bengal, India
  • 2. Univ Texas Dallas, Dept Elect & Comp Engn, Richardson, TX 75080 USA
  • 3. Univ Texas Tyler, Dept Elect Engn, Tyler, TX 75799 USA
  • 4. Tech Univ Denmark, Danish Offshore Technol Ctr, DK-2800 Lyngby, Denmark; Ctr Technol Telecomunicac Catalunya, SRCOM, Barcelona 08860, Spain

Description

Identifying disease biomarkers and detecting hazardous, explosive, flammable, and polluting gases and chemicals with extremely sensitive and selective sensor devices remains a challenging and time-consuming research challenge. Due to their exceptional characteristics, semiconducting metal oxides (SMOxs) have received a lot of attention in terms of the development of various types of sensors in recent years. The key performance indicators of SMOx-based sensors are their sensitivity, selectivity, recovery time, and steady response over time. SMOx-based sensors are discussed in this review based on their different properties. Surface properties of the functional material, such as its (nano)structure, morphology, and crystallinity, greatly influence sensor performance. A few examples of the complicated and poorly understood processes involved in SMOx sensing systems are adsorption and chemisorption, charge transfers, and oxygen migration. The future prospects of SMOx-based gas sensors, chemical sensors, and biological sensors are also discussed.

Notes

This material is based upon work supported by ST's National Science Foundation award under Grant No. ECCS-2138701 and VentureWell Grant 21716-20.

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