Published November 28, 2023 | Version v1
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Data of "Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing"

Authors/Creators

  • 1. ROR icon Universidad de Zaragoza
  • 2. ROR icon Instituto de Nanociencia y Materiales de Aragón

Description

Data of the publication "Spatially selective crystallization of ferroelectric Hf0.5Zr0.5O2 films induced by sub-nanosecond laser annealing"

We acknowledge financial support from Spanish Agencia Estatal de Investigación through grants PID2020-112914RB-I00 and PID2020-113034RB-I00 funded by MCIN/AEI/10.13039/501100011033, and from Gobierno de Aragón (research groups T54_23R and E28_23R).

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