Published March 9, 2023
| Version 1.0
Dataset
Open
Data-driven plasma modelling: Fluorocarbon ICP data set
Authors/Creators
- 1. University of Exeter
- 2. Oxford Instruments Plasma Technology
Description
This is an open source dataset of optical emission spectra and optical images in fluorocarbon plasmas, along with associated tool logs, captured from a Oxford Intruments Plasma Technology PP100 ICP etcher. The dataset consists of Ar, O2, Ar/O2, CF4/O2 and SF6/O2 gas mixtures etching Si wafers.
The data has been split into chunks for uploading to Zenodo, to reconstruct them:
$ cat generative_model-fluorocarbon_data_set.tar.xz* > generative_model-fluorocarbon_data_set.tar.xz
$ tar -xvf generative_model-fluorocarbon_data_set.tar.xz
You can find the code to train an autoencoder model using the optical emission spectra and optical images at our github repo, https://github.com/gregdaly/generative_modelling_for_optical_plasma_diagnostics
Files
Files
(48.8 GB)
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md5:b5d4d52e503860d4b1ddd0d2c7d8fdae
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4.9 GB | Download |
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md5:c6ae172fd8190c553886a69568c418e3
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4.9 GB | Download |
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md5:6bb1a614b97df156098f09c76aa952ac
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4.9 GB | Download |
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md5:f9f67e366d194e86ee84525ad7f13f22
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4.9 GB | Download |
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md5:041429aa3c7e1c5e0de8737cf82bbc23
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4.9 GB | Download |
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md5:f161913c3c8d6d988a0326a5be2e6ff5
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4.9 GB | Download |
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md5:64780a70d0f435d6a183da7e29ff0c2a
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4.9 GB | Download |
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md5:1c204d176a6fb1f67db0da6fc6164ba2
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4.9 GB | Download |
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md5:1657a470be029b385e2ca4e3a9218a4c
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4.9 GB | Download |
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md5:95505c24d2e920fd1ed8fbf3b9d01240
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4.9 GB | Download |
Additional details
Funding
- UK Research and Innovation
- EPSRC Centre for Doctoral Training in Sustainable Materials and Manufacturing (EngD) EP/L016389/1