Published February 10, 2023 | Version 1
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Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography (Data)

Authors/Creators

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Laboratory for Emerging Nanometrology (LENA)
  • 2. Physikalisch-Technische Bundesanstalt (PTB)
  • 3. Kenya Bureau of Standards (KEBS), Department of Metrology
  • 4. GETec Microscopy GmbH
  • 5. GETec Microscopy GmbH and Quantum Design Microscopy GmbH

Description

Raw data and figures used for the article "Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography", published in Sensors 2023, 23(4), 2003.

Notes

This research is funded by the EMPIR 17IND05 MicroProbes and 19ENG05 NanoWires projects. The projects 17IND05 MicroProbes and 19ENG05 NanoWires have received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program.

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Additional details

Related works

Is supplement to
Journal article: 10.3390/s23042003 (DOI)