Published June 17, 2022
| Version v1
Dataset
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Spectroscopic ellipsometry measurements of DLC:Ag (samples 139, 140)
Description
Spectroscopic ellipsometry measurement data obtained from the hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite deposited on quartz (Q) and silicon (Si) substrates. DLC:Ag was deposited employing reactive unbalanced magnetron sputtering in direct current mode using silver target. Process parameters: 80 sccm argon gas flow, 5.4 sccm C2H2 gas flow, 7·10-3 mbar work pressure, 419-422 V or 405 V voltage (sample 139 or 140, respectively), 0.09-0.11 A or 0.09-0.10 A current (sample 139 or 140, respectively), 2 minutes 35 seconds or 2 minutes 32 seconds process duration (sample 139 or 140, respectively).
The measurements were carried out at 5 locations on each sample and each substrate.
Ellipsometer: rotating compensator GES5-E (Semilab).
Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.
Detector: UV-Vis CCD with 0.8 nm resolution.
Spectral range: approximately 230-960 nm.
Light incidence angles: 50°, 55°, 60°, 65°, 70°, 75°.
Light beam size: microspot (365 × 470 μm2 at 75° angle of incidence).
Notes
The research was carried out under postdoctoral project "Patterned hybrid multilayer films for optical sensors", No. 1.1.1.2/VIAA/4/20/615.
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