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Published September 3, 1977 | Version v1
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Integrated Strain-Sensitive Element of Mechanical Transducer with Low Temperature Instability

Description

The creation of a silicon integrated sensing element for a transducer of mechanical quantities with high temperature stability of measurements in the range from -60℃ to +80℃ is considered. The optimum impurity concentrations in p-type diffusion resistors when the bridge circuit is powered by a DC current source (DCV) and a DC current source (DCC) are selected.

Notes

Published in USSR-Ukraine, 1977: Spalek, Y. M., Tikhomirov, M. Y., Kharenko, K. Y., Giletsky N. P., Yazovtsev V. I., Bogatov P.N., & Borshchev, V. N. (1977). Integral Strain-Sensitive Element ofMechanical Quantities with Low Temperature Instability of Parameters. Technology. Technology of Instrument Making: Collection of Scientific-Technical Documents /TsNTI "Poisk" (In Russian),3(14), 19–27

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