Spectroscopic ellipsometry mapping of PAAO:DLC:Ag (AJ-6-03-31-DLCAg sample)

Spectroscopic ellipsometry measurement data obtained from the porous anodized aluminum oxide (PAAO) covered with hydrogenated amorphous diamond-like carbon and silver (DLC:Ag) nanocomposite. The sample was made by 2 processes: (1) anodization of aluminum polycrystal in 0.3 mol/L oxalic acid at 40 V for 3 minutes and 42 seconds and then (2) depositing DLC:Ag employing reactive unbalanced magnetron sputtering in direct current mode using silver target (80 sccm argon gas flow, 5.4 sccm C₂H₂ gas flow, 405 V voltage, 0.09-0.10 A current, 7·10^-3 mbar work pressure, 2 minutes 32 seconds process duration).

The measurements were carried out at 20 × 20 locations covering all of the sample surface (approximately 4.8 × 4.8 mm²). The coordinates of each of 400 locations are available in "mapping_points.csv" file. All measurement data is also included in a single "AJ-6-03-31-DLCAg Ellipsometry Mapping Measurements.rar" file.

Ellipsometer: rotating compensator GES5-E (Semilab).

Light source: 75 W xenon short arc lamp with 185-2000 nm wavelength spectrum.

Detector: UV-Vis CCD with 0.8 nm resolution.

Spectral range: approximately 230-960 nm.

Light incidence angles: 55°, 60°, 65°, 70°, 75°.

Light beam size: microspot (365 × 470 μm² at 75° angle of incidence).

The same sample was also measured using the same spectroscopic ellipsometry method before being covered with DLC:Ag. The data can be found here: https://doi.org/10.5281/zenodo.7049977