Composition and electrical resistance results of a Ir-Pd-Pt-Rh-Ru composition spread thin film materials library

The dataset contains the results of electrical resistance measurement and composition analysis of a thin film composition spread materials library. 

342 measurement areas were evaluated for chemical composition using energy dispersive X-ray spectroscopy and electrical resistance using a 4-point probe.

CSV columns:

x: x-coordinate of materials library in µm

y: y-coordinate of materials library in µm

Ir: relative chemical composition in at.%

Pd: relative chemical composition in at.%

Pt: relative chemical composition in at.%

Rh: relative chemical composition in at.%

Ru: relative chemical composition in at.%

Resistance: electrical resistance in Ohm

This dataset is supplementary information for an associated publication. A link to the publication will be provided after publishing.