Published June 24, 2022
| Version v1
Dataset
Open
Coupling Silicon Lithography with Metal Casting-Data Set
Authors/Creators
- 1. École Polytechnique Fédérale de Lausanne (EPFL)
Description
Dataset corresponding to the article Coupling Silicon Lithography with Metal Casting https://doi.org/10.1016/j.apmt.2022.101647
Files
01-Video Supplementary.mp4
Files
(456.9 MB)
| Name | Size | |
|---|---|---|
|
md5:112a2661c4424b4dcea6ab71f5b430cc
|
12.1 MB | Preview Download |
|
md5:a2fb8a60771fbfbf79fe4fff28dbc8b6
|
14.7 MB | Preview Download |
|
md5:7f9b160883d71ae4f885482077c98ee2
|
8.2 MB | Preview Download |
|
md5:5b1e8e06a86bad194e78f9538e1ddc9d
|
11.4 MB | Preview Download |
|
md5:5435be1901a4b36ced16dd2c4e8652d6
|
216.3 MB | Download |
|
md5:1613ec4eaa56e46093756dbcada460f9
|
135.8 MB | Download |
|
md5:d17e5dd326d1c859b07b13d0e3b96fe2
|
58.5 MB | Download |