Published February 14, 2022 | Version v1
Dataset Open

Data and codes for "Perimeter modes of nanomechanical resonators exhibit quality factors exceeding 10^9 at room temperature"

Description

Data and codes for "Perimeter modes of nanomechanical resonators exhibit quality factors exceeding 109 at room temperature"

Notes

This work was supported by funding from the Swiss National Science Foundation under grant agreement no. 182103, the EU H2020 research and innovation program under grant agreement no.732894 (HOT) and the European Research Council grant no. 835329 (ExCOM-cCEO). G.H. and N.J.E. acknowledge support from the Swiss National Science Foundation under grant no. 185870 (Ambizione). All samples were fabricated at the Center of MicroNano Technology (CMi) at EPFL.

Files

Data and fabrication mask for Perimeter modes of nanomechanical resonators exhibit quality factors exceeding 1 billion at room temperature.zip

Additional details

Funding

European Commission
HOT - Hybrid Optomechanical Technologies 732894
Swiss National Science Foundation
Cavity Quantum Optomechanics with Nanomechanical Oscillators 200020_182103
Swiss National Science Foundation
Quantum Optomechanics with Ultralow Mechanical Dissipation PZ00P2_185870