Dataset Open Access

Dataset for "Integrated acoustic resonators in commercial fin field-effect transistor technology"

Jackson Anderson; Yanbo He; Bichoy Bahr; Dana Weinstein

Companion dataset and code for "Integrated acoustic resonators in commercial fin field-effect transistor technology" by Anderson, He, Bahr, and Weinstein.

https://www.nature.com/articles/s41928-022-00827-6

https://arxiv.org/abs/2107.00608

 

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Publication date:
January 24, 2022
DOI:
10.5281/zenodo.5899507

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