Published November 23, 2021 | Version 1
Dataset Open

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure (Data)

Authors/Creators

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
  • 2. TU Braunschweig, Institute of Semiconductor Technology (IHT)
  • 3. SCL-Sensor. Tech. Fabrication GmbH
  • 4. GETec Microscopy GmbH
  • 5. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Center for Electronics and Telecommunication

Description

Origin projects, figures and LabVIEW software used for the article "Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure", published in Sensors on 14 Jun 2021.

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

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Additional details

Related works

Is supplement to
Journal article: 10.3390/s21124088 (DOI)