Published November 23, 2021
| Version 1
Dataset
Open
In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection (Data)
Authors/Creators
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
- 2. TU Braunschweig, Institute of Semiconductor Technology (IHT)
- 3. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Kenya Bureau of Standards (KEBS), Department of Metrology
- 4. Fraunhofer Wilhelm‐Klauditz‐Institut (WKI)
- 5. SCL‐Sensor.Tech. Fabrication GmbH
- 6. GETec Microscopy GmbH
Description
Origin projects, figures and LabVIEW software used for the article "In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection", published in Sensors on 22 Jan 2020.
Notes
This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.
Files
Data.zip
Files
(23.6 MB)
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Additional details
Related works
- Is supplement to
- Journal article: 10.3390/s20030618 (DOI)