Published November 23, 2021 | Version 1
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Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors (Data)

Authors/Creators

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
  • 2. TU Braunschweig, Institute of Semiconductor Technology (IHT)
  • 3. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Kenya Bureau of Standards (KEBS), Department of Metrology

Description

Origin projects, figures and COMSOL simulation used for the article "Phase optimization of thermally actuated piezoresistive resonant MEMS cantilever sensors", published in Journal of Sensors and Sensor Systems on 14 Jan 2019.

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

Files

Data.zip

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Additional details

Related works

Is supplement to
Journal article: 10.5194/jsss-8-37-2019 (DOI)