Published November 23, 2021 | Version 1
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Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors (Data)

Authors/Creators

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
  • 2. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Kenya Bureau of Standards (KEBS), Department of Metrology
  • 3. TU Braunschweig, Institute of Semiconductor Technology (IHT)

Description

Origin projects and figures used for the article "Enhancement of unsteady frequency responses of electro-thermal resonance MEMS cantilever sensors", published in the proceedings of the 30th Micromechanics and Microsystems Europe Workshop; 18.08.2019 to 20.08.2019; Wolfson College, Oxford, United Kingdom.

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

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Additional details

Related works

Is supplement to
Conference paper: 10.1088/1742-6596/1837/1/012003 (DOI)