Published November 23, 2021 | Version 1
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Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement (Data)

Authors/Creators

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Indonesia Institute of Sciences (LIPI), Research Centre for Physics
  • 2. TU Braunschweig, Institute of Semiconductor Technology (IHT) and Kenya Bureau of Standards (KEBS), Department of Metrology
  • 3. TU Braunschweig, Institute of Semiconductor Technology (IHT)

Description

Origin projects, figures and COMSOL simulation used for the article "Improvement of frequency responses of an in-plane electro-thermal cantilever sensor for real-time measurement", published in Journal of Micromechanics and Microengineering on 05 Nov 2019.

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

Files

Data.zip

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Additional details

Related works

Is supplement to
Journal article: 10.1088/1361-6439/ab4e29 (DOI)