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Published July 15, 2022 | Version 1.0
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Stress analysis and Q-factor of free-standing (La,Sr)MnO3 oxide resonators (Dataset)

Description

Datafiles of the article "Stress analysis and Q-factor of free-standing (La,Sr)MnO3 oxide resonators"

Files

Datafiles-LSMO_MEMS_resonators_characterization.zip

Files (2.4 MB)

Additional details

Related works

Is supplement to
Journal article: 10.5281/zenodo.6806069 (DOI)
Journal article: 10.1002/smll.202202768 (DOI)

Funding

OXiNEMS – Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields 828784
European Commission