Published July 19, 2021 | Version 1.0
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The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates

  • 1. CNR-SPIN
  • 2. Università degli Studi di Genova

Description

Datafiles for the Figures and Supplementary Material of the article "The role of etching anisotropy in the fabrication of freestanding oxide microstructures on SrTiO3(001), SrTiO3 (110), and SrTiO3 (111) substrates" published in Applied Physics Letters by Alejandro E. Plaza et al. (2021)

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Additional details

Related works

Is supplement to
Journal article: 10.1063/5.0056524 (DOI)
Preprint: 10.5281/zenodo.5105675 (DOI)

Funding

OXiNEMS – Oxide Nanoelectromechanical Systems for Ultrasensitive and Robust Sensing of Biomagnetic Fields 828784
European Commission