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Published February 2, 2021 | Version 1.0.0
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Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry (Data)

  • 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)

Description

Raw data, scripts and figures used for the article "Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry", published in Proceedings on 21 Nov 2018.

The data/scripts can be opened/executed by the software "Matlab"

Notes

This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.

Files

Data.zip

Files (28.3 MB)

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Additional details

Related works

Is supplement to
Journal article: 10.3390/proceedings2130889 (DOI)