Published February 2, 2021
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Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry (Data)
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)
Description
Raw data, scripts and figures used for the article "Optimizing a Cantilever Measurement System towards High Speed, Nonreactive Contact-Resonance-Profilometry", published in Proceedings on 21 Nov 2018.
The data/scripts can be opened/executed by the software "Matlab"
Notes
Files
Data.zip
Files
(28.3 MB)
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md5:cc84f7c4c8bca6a6fbf365a6524cc106
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Additional details
Related works
- Is supplement to
- Journal article: 10.3390/proceedings2130889 (DOI)