Published January 29, 2021
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Calibrating a high-speed contact-resonance profilometer (Data)
- 1. TU Braunschweig, Institute of Semiconductor Technology (IHT)
- 2. Bundesanstalt für Materialforschung und -prüfug
Description
Raw data, scripts and figures used for the article "Calibrating a high-speed contact-resonance profilometer", published in Journal of Sensors and Sensor Systems on 07 Jul 2020.
The data/scripts can be opened/executed by the software "Matlab"
Notes
This project has received funding from the EMPIR program co-financed by the Participating States and from the European Union's Horizon 2020 research and innovation program under no. 17IND05 MicroProbes.
Files
Data.zip
Files
(116.8 MB)
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md5:52eb85cf2200b792fc500dacbf9c4411
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Additional details
Related works
- Is supplement to
- Journal article: 10.5194/jsss-9-179-2020 (DOI)