Published September 10, 2020
| Version v1
Conference paper
Open
Automated Contacting of On-Wafer Devices for RF Testing
- 1. VSL, Dutch Metrology Institute, The Netherlands
- 2. Delft University of Technology, The Netherlands
Description
A method is presented for automated probing of on-wafer devices for measurements at millimetre-wave frequencies. The proposed method automatically detects the contact between the measurement probe and on-wafer device, based on the evaluation of variation in the input reflection coefficient. It is shown that using this automated technique, about five times better measurement repeatability is achieved in millimetre-wave device characterisation.
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