Journal article Open Access
Injection photodiods based on metal oxide semiconductors
Morari, Vadim; Ursaki, Veaceslav; Rusu, Emil; Tiginyanu, Ion
A brief review of our recent research on injection photodiodes based on metal oxide semiconductors deposited onto Si substrates is presented. A series of ZnSnO, NiO, and Zn1-xMgxO thin films are prepared by aerosol spray pyrolysis deposition or sol–gel spin coating on Si substrates with a post-deposition thermal treatment in air at a temperature of 500oC. The morphology of films is studied by scanning electron microscopy and atomic force microscopy, while their elemental composition and crystal structure are determined from energy dispersive X-ray (EDAX) and X-ray diffraction (XRD) analysis, respectively. It is shown that the produced n-ZnSnO/p-Si, n-ZnMgO/p-Si, and p-NiO/n-Si heterojunctions operate as injection photodiodes at a forward bias.
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- Publication date:
- October 15, 2020
- DOI:
-
- Keyword(s):
- thin films aerosol spray pyrolysis sol–gel spin coating injection photodiodes
- Published in:
- Moldavian Journal of the Physical Sciences: 1-2 pp. 98-109 (19).
- Communities:
- License (for files):
- Creative Commons Attribution 4.0 International