Published October 22, 2020
| Version v1
Dataset
Open
The anisotropy in the optical constants of quartz crystals for soft X-rays
Creators
- 1. Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany
- 2. National Institute of Standards and Technology (NIST), Gaithersburg, Maryland, USA
- 3. ASML Netherlands B.V. (ASML), Netherlands
Description
The refractive index of a y-cut SiO2 crystal surface is reconstructed from polarization dependent soft X-ray reflectometry measurements in the energy range from 45 eV to 620 eV. In the datasets the 1-delta and beta values for the (100) and (001) direction of the SiO2 crystal for the different energies are provided.
Files
delta_beta_SiO2_001.txt
Files
(60.2 kB)
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Additional details
Related works
- Is supplement to
- http://arxiv.org/abs/2010.09436 (URL)