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Published March 10, 2020 | Version v1
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Prediction of plasma etching yields by machine learning to reveal the complexity of underlying physics

Authors/Creators

  • 1. National Institute for Materials Science, Japan

Description

tables

Files

TableEmaxESresult.csv

Files (1.2 kB)

Name Size
md5:80ef593041559fad164d1837bbe52c20
130 Bytes Preview Download
md5:e1d53cb15bddd557143c46a4d2572973
179 Bytes Preview Download
md5:c3423a783b81501c1d2e24760b050afc
537 Bytes Preview Download
md5:51005e494bc335db2101f703b748ff9d
371 Bytes Preview Download