Nanolaminography dataset: Three-dimensional imaging of integrated circuits with a macro to nanoscale zoom

Here we present a ptychographic X-ray laminography (PyXL) dataset. It is a new approach for nano-imaging that combines a coherent diffractive imaging technique called ptychography with laminography, which is a generalization of tomography. This allows achieving sub-20 nm resolution over large sample volumes. 

Non-destructive three-dimensional imaging over large volumes with nano-scale resolution is a challenge faced in many fields, perhaps most acutely in mapping the natural neural connectome and artificial silicon-based integrated circuits. For the latter, such inspection is of interest for quality control and security acquiring particular importance due to the delocalized nature of the chain connecting chip design, manufacture and use. A hierarchy of probes are used to image at length scales from that of the entire chip (millimeters) to those of individual features (nanometers) of the underlying transistors, starting with optical microscopy and finishing with transmission electron microscopy on thin slices prepared using a focused ion beam. What has been missing until now is a single technique yielding a three-dimensional image of the entire chip volume with zooming capability to produce high-resolution images of arbitrarily chosen sub-regions, including virtual delayering.

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