Published April 18, 2019
| Version v1
Conference paper
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Fabrication of Division-of-focal-plane Polarizer Arrays by Electron Beam Lithography
Authors/Creators
- 1. Changchun University of Science and Technology
Description
The division-of-focal-plane (DoFP) polarizer is used to capture polarization information in real time without rotating the
polarizer. In this paper, different periods of aluminum nano-wire grids with four different orientations offset by 45° are fabricated using electron beam lithography (EBL) and inductively coupled plasma-reactive ion etching (ICP-RIE). The pitch of each unit is 7.4 µm with a standard square. The transmission intensity measurement of DoFP arrays was presented to obtain the extinction ratios and transmission ratios which were used to evaluate the performance of grid polarizers.