System level modeling of the micromirror cell

This tutorial deals with the models development and simulations of the micromirror as a component at system level design. The compact models of micromirror are based on Mode Superposition based Reduced Order Modeling technique. The VHDL-AMS and MATLAB/Simulink are used for implementation and simulation. The important aspects in developing the system models and the necessary parameters in creating are presented. The developed models can be used for the co-simulation with any other system environment or complex electronic circuit.