Published April 4, 2025
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Beyond Structural Stabilization of Highly-Textured AlN Thin Films: The Role of Chemical Effects
Authors/Creators
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1.
Swiss Federal Laboratories for Materials Science and Technology
Description
Full data set and high-resolution figures for the article:
Beyond Structural Stabilization of Highly-Textured AlN Thin Films: The Role of Chemical Effects
Oleksandr V. Pshyk, Jyotish Patidar, Mohammad Alinezhadfar, Siarhei Zhuk, Sebastian Siol
Adv. Mater. Interfaces 2024, 11, 2400235
Files
Fig 1a.txt
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Additional details
Related works
- Is supplement to
- Publication: 10.1002/admi.202400235 (DOI)
Funding
- Swiss National Science Foundation
- Metal-Ion Synchronized Reactive HiPIMS of AlScN for Piezoelectric Applications 196980