Published March 17, 2025
| Version v1
Dataset
Open
OCT experimental spectral data, EUV range.
Authors/Creators
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1.
Military University of Technology in Warsaw
Description
data are preented in tabelarized form. First column is a wavelength wector in [nm], second column: OCT sample reflectivity with Zr filter, third column: OCT sample reflectivity with Al filter, fourth (D) column: reference reflectivity from Si wafer and Zr filter, fifth (E) column: reference reflectivity from Si wafer and Al filter. Sample: Si wafer with Au (10nm width) buried layer.
Files
Files
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