Superconducting integrated circuit fabrication with low temperature ECR-based PECVD SiO/sub 2/ dielectric films

Authors/Creators

• Sauvageau, J. E.
• Burroughs, C. J.
• Booi, P. A. A.
• Cromar, M. W.
• Benz, R. P.
• Koch, J. A.