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Published January 1, 1993 | Version v1
Journal article Open

Charge trapping and transport properties of SIMOX buried oxides with a supplemental oxygen implant

Authors/Creators

  • Boesch, H. E.
  • Taylor, T. L.
  • Krull, W. A.

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n/a

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DOI
10.1109/23.273483
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DOI

10.1109/23.273483

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Created
June 4, 2018
Modified
August 2, 2024

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