The Archive contains all raw and processed (fitted) data that is used in the manuscript "surface acoustic wave resonators on thin film piezoelectric substrates in the quantum regime" submitted to IOP Materials for quantum technology. Translation of samples into the names in the Paper: (long,short refers to the orientation of the SAW resonator in reference to the chip ,i.e. long=SAW-resonator along the long side of the chip) LNO: - AJ050101 --> A1 (L=0.7mm) - AJ250201 --> A2 (L=0.4mm) - AJ040302_0p3mm --> A3 (L=0.3mm) - AJ040302_0p2mm --> A4 (L=0.2mm) LNO-SiOx-Si: - AJ030201 --> B1 (L=0.7mm) - AJ030202 --> B2 (L=0.8mm) - AJ250202 --> B3 (L=0.3mm) LNO-Si: - TL-NGK-2 --> C1 (short, L=0.8mm) - TL-NGK-2 --> C2 (short, L=1.2mm) - TL-NGK-2 --> C3 (long, L=0.8mm) - TL-NGK-2 --> C4 (long, L=1.2mm) ------------------------------------------------------------------------------------------------------------------------------------------------------------------------ Let me illustrate on the basis of the SAW resonator TL-NGK-2 --> C1 (short,L=0.8mm) the general structure of this archive: raw data: .\Data\LNO-Si\TL-NGK-2-Y-X-0.8mm (power measurement) .\Data\LNO-Si\Aj TL-NGK-2-0.8-temp (temperature sweep) Raw data are S11 measurements in .csv format with two columns: frequency and complex S11 parameter An example script(python, jupyter notebook) for processing and fitting the raw data is found under .\Analysis\#20-07-AJ-250202-0p3mm.ipynb processed data (fit results): .\Results\LNO-Si\AJTL-NGK-2l0-8-short\Properties.xslv (general properties, such as r,f_c,v etc.) .\Results\LNO-Si\AJTL-NGK-2l0-8-short\ModeX\result.xlsv (power dependent measurement for the mode X) .\Results\LNO-Si\AJTL-NGK-2l0-8-short\Qi-Bruno.xslv (quality factor shift-temperature dependence) .\Results\LNO-Si\AJTL-NGK-2l0-8-short\temperature-Bruno.xslv (frequency shift) Processed data are split into several .csv files, containing general info about the chip/measurement as well as the fit results of power and temperature sweeps. This structure also applies for every other measurement with differences being LNO/LNO-SiOx-Si/LNO-Si and then the different names and lengths of the chip and SAW-resonators.