====== C (10) into Layer 1                      =======
        SRIM-2008.04
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
--------------------------------------------------------------------
    Recoil/Damage Calculations made with Kinchin-Pease Estimates    
--------------------------------------------------------------------
----------------------------------------------------------------
  There are NO RECOILS unless a full TRIM calculation is made.   
----------------------------------------------------------------
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    =  C   Energy = 36  keV
============= TARGET MATERIAL ======================================
Layer  1 : Si
Layer Width =     2.E+03 A   Layer # 1- Density = 4.976E22 atoms/cm3 = 2.321 g/cm3
  Layer # 1- Si = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =15000.00
 Ion Average Range =   113.5E+01 A   Straggling =   412.5E+00 A
 Ion Lateral Range =   380.4E+00 A   Straggling =   471.0E+00 A
 Ion Radial  Range =   585.2E+00 A   Straggling =   291.2E+00 A
====================================================================
 Transmitted Ions =20;  Backscattered Ions =157
 (These are not included in Skewne- and Kurtosis below.)

 Range Skewne- = -000.2430  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 002.6038  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH          C       Recoil     
   (Ang.)       Ions     Distribution
-----------  ----------  ------------
220100.E-04  3.0303E+03  0.0000E+00
440100.E-04  2.1212E+03  0.0000E+00
660100.E-04  5.4545E+03  0.0000E+00
880100.E-04  3.9394E+03  0.0000E+00
110010.E-03  6.9697E+03  0.0000E+00
132010.E-03  9.3939E+03  0.0000E+00
154010.E-03  1.1212E+04  0.0000E+00
176010.E-03  7.8788E+03  0.0000E+00
198010.E-03  1.3636E+04  0.0000E+00
220010.E-03  1.1212E+04  0.0000E+00
242010.E-03  1.5455E+04  0.0000E+00
264010.E-03  1.6667E+04  0.0000E+00
286010.E-03  1.7576E+04  0.0000E+00
308010.E-03  1.6061E+04  0.0000E+00
330010.E-03  1.9697E+04  0.0000E+00
352010.E-03  1.8788E+04  0.0000E+00
374010.E-03  2.0000E+04  0.0000E+00
396010.E-03  2.0000E+04  0.0000E+00
418010.E-03  2.3030E+04  0.0000E+00
440010.E-03  2.9394E+04  0.0000E+00
462010.E-03  3.0000E+04  0.0000E+00
484010.E-03  2.7273E+04  0.0000E+00
506010.E-03  3.2424E+04  0.0000E+00
528010.E-03  3.2121E+04  0.0000E+00
550010.E-03  3.8788E+04  0.0000E+00
572010.E-03  3.6061E+04  0.0000E+00
594010.E-03  3.2727E+04  0.0000E+00
616010.E-03  4.0606E+04  0.0000E+00
638010.E-03  4.5151E+04  0.0000E+00
660010.E-03  3.4242E+04  0.0000E+00
682010.E-03  4.6970E+04  0.0000E+00
704010.E-03  4.0909E+04  0.0000E+00
726010.E-03  5.1818E+04  0.0000E+00
748010.E-03  5.3333E+04  0.0000E+00
770010.E-03  5.6970E+04  0.0000E+00
792010.E-03  5.9091E+04  0.0000E+00
814010.E-03  6.3030E+04  0.0000E+00
836010.E-03  6.6364E+04  0.0000E+00
858010.E-03  6.9394E+04  0.0000E+00
880010.E-03  6.3030E+04  0.0000E+00
902010.E-03  6.9394E+04  0.0000E+00
924010.E-03  7.7576E+04  0.0000E+00
946010.E-03  6.6364E+04  0.0000E+00
968010.E-03  7.5455E+04  0.0000E+00
990010.E-03  7.3333E+04  0.0000E+00
101201.E-02  8.6061E+04  0.0000E+00
103401.E-02  9.4546E+04  0.0000E+00
105601.E-02  7.8788E+04  0.0000E+00
107801.E-02  8.9091E+04  0.0000E+00
110001.E-02  9.0303E+04  0.0000E+00
112201.E-02  9.2425E+04  0.0000E+00
114401.E-02  9.1515E+04  0.0000E+00
116601.E-02  9.6061E+04  0.0000E+00
118801.E-02  8.1818E+04  0.0000E+00
121001.E-02  9.7879E+04  0.0000E+00
123201.E-02  9.5758E+04  0.0000E+00
125401.E-02  9.4849E+04  0.0000E+00
127601.E-02  9.2425E+04  0.0000E+00
129801.E-02  9.3637E+04  0.0000E+00
132001.E-02  9.5152E+04  0.0000E+00
134201.E-02  9.3334E+04  0.0000E+00
136401.E-02  8.9091E+04  0.0000E+00
138601.E-02  8.6364E+04  0.0000E+00
140801.E-02  7.4849E+04  0.0000E+00
143001.E-02  8.7576E+04  0.0000E+00
145201.E-02  7.6364E+04  0.0000E+00
147401.E-02  7.4243E+04  0.0000E+00
149601.E-02  7.5455E+04  0.0000E+00
151801.E-02  6.7879E+04  0.0000E+00
154001.E-02  6.7273E+04  0.0000E+00
156201.E-02  7.0000E+04  0.0000E+00
158401.E-02  6.1818E+04  0.0000E+00
160601.E-02  6.2424E+04  0.0000E+00
162801.E-02  6.8182E+04  0.0000E+00
165001.E-02  5.0000E+04  0.0000E+00
167201.E-02  4.6970E+04  0.0000E+00
169401.E-02  4.3939E+04  0.0000E+00
171601.E-02  4.8485E+04  0.0000E+00
173801.E-02  3.7576E+04  0.0000E+00
176001.E-02  3.6364E+04  0.0000E+00
178201.E-02  3.5758E+04  0.0000E+00
180401.E-02  2.9091E+04  0.0000E+00
182601.E-02  2.7576E+04  0.0000E+00
184801.E-02  2.4545E+04  0.0000E+00
187001.E-02  1.8788E+04  0.0000E+00
189201.E-02  1.9091E+04  0.0000E+00
191401.E-02  1.6667E+04  0.0000E+00
193601.E-02  1.8788E+04  0.0000E+00
195801.E-02  9.6970E+03  0.0000E+00
198001.E-02  1.1515E+04  0.0000E+00
200201.E-02  6.9697E+03  0.0000E+00
202401.E-02  8.1818E+03  0.0000E+00
204601.E-02  6.3636E+03  0.0000E+00
206801.E-02  3.9394E+03  0.0000E+00
209001.E-02  2.1212E+03  0.0000E+00
211201.E-02  3.0303E+03  0.0000E+00
213401.E-02  3.0303E+03  0.0000E+00
215601.E-02  1.8182E+03  0.0000E+00
217801.E-02  6.0606E+02  0.0000E+00
220001.E-02  1.8182E+03  0.0000E+00
